CIMPortal Plus - Software for EDA/Interface A

The CIMPortalTM Plus software toolkit provides a comprehensive equipment data acquisition (EDA) solution for equipment manufacturers. In addition, CIMPortal Plus software can be used by integrated device manufacturers (IDMs) who are retrofitting existing equipment.

The Software Development Kit (SDK) includes tools for designing, developing, testing, optimizing, and deploying EDA/Interface A communications that fully comply with the SEMI standards and accommodate data collection from different software and hardware platforms.

CIMPortal Plus is built upon the award-winning, industry-leading CIMPortal Plus software toolkit that has set the Interface A connectivity standard for semiconductor equipment suppliers. Cimetrix developed CIMPortal Plus specifically to help equipment makers support both versions of the EDA/Interface A standards - Freeze Version I (1105) and Freeze Version II (0710).

In addition, CIMPortal Plus supports the more recent SEMI E164 Specification for EDA Common Metadata. The E164 standard, initially approved by SEMI in mid-2012, was developed to encourage companies using Interface A connections to provide a more common representation of equipment metadata based upon the SEMI E125 Specification for Equipment Self-Description. Developers can use the Metadata Conformance Analyzer (MCA), available from SEMATECH, to validate the equipment models they generate.

Equipment suppliers use the CIMPortal Plus software to implement an EDA/Interface A factory connection in the minimum amount of time and cost. In particular, they like the many features CIMPortal Plus offers that make tool model building easier than any other solution, including an easy-to-use GUI with Visual Studio-style property windows and drop-down menus for drag-and-drop model building.

Complete EDA/Interface A Connectivity Solution

Cimetrix actively participated on the SEMI EDA Standards committee to generate industry standards, and with SEMATECH (ISMI) to develop software products for testing completed equipment EDA interfaces that facilitate data acquisition integration and improve data quality.

The CIMPortal Plus software is part of the complete Cimetrix EDA/Interface A connectivity solution that supports both the equipment-side and the client-side implementation of SEMI standards. Other Cimetrix products that support EDA/Interface A development and implementation are:

  • EDAConnectTM software to enable semiconductor and LED fabs to gather data from wafer processing and testing equipment. This data is vital for identifying opportunities to reduce costs, improve quality, and increase productivity. EDAConnect is available for purchase from Cimetrix.

  • ECCE Plus (Equipment Client Connection Emulator), an EDA reference client with an easy-to-use Graphical User Interface, used for testing the connection and verifying messages. Cimetrix developed the original ECCE software under contract with SEMATECH, and we have developed significant enhancements to support the testing Interface A. ECCE Plus is included with the purchase of CIMPortal Plus.

Once the Interface A solution is completed, multiple Interface A Clients implemented by the fab can simultaneously establish sessions with the CIMPortal Plus Engine, define Data Collection Plans and receive the generated Data Collection Reports. After deployment, the E132 authentication, message security and diagnostics features are configurable through the CIMPortal Administrator without the need to restart. In accordance with the SEMI EDA standards, CIMPortal Plus provides all of the features necessary so that the semiconductor fab can extend the Equipment Model with new components and metadata.

Fabs can use the Interface A data they gather for fault detection and classification (FDC), run-to-run control, equipment health monitoring, chamber/tool matching, predictive maintenance, virtual metrology, e-diagnostics, and many other equipment-related analytical applications.

Visit the CIMPortal Resources page for more information.

CIMPortal Plus Architecture

CIMPortal Plus Architecture

Database Service

CIMStore, the CIMPortal Plus database module supports collecting data into an SQL database for storage on the tool. CIMStore is compatible with MySQL, MS SQL, and Oracle databases. The module complies with industry specifications, guidelines, and requirements for storage and management of data in a local database. All data available to Interface A clients can also be stored in the on-tool database.

Web Service

CIMWeb, developed with Windows Communication Foundation (WCF) technology, implements all of the required state machines and automatically handles session persistence, data collection plan persistence and data collection report buffering. CIMWeb also supports built-in Data Collection Plans.

Data Collection Interface Modules (DCIM)

CIMPortal Plus gathers data directly from multiple sources, unifies the data within a single Equipment Model, and delivers the unified data seamlessly into an Interface A implementation using Cimetrix technology called Data Collection Interface Modules (DCIMs). All of the different data sources are integrated into a single E125 compliant Equipment Model.

CIMPortal Plus includes a template for creating custom DCIM and technical assistance for using each of the packaged DCIM. Use the DCIM test application to unit test DCIM development and configuration. During development, testing, and optimization, you can use the Cimetrix ECCE Plus emulator to validate the interface implementation.

Complete Interface A Connectivity Solution for Equipment Suppliers

Feature

Benefit

Complete set of Interface A tools

Develop, test, and deploy faster by aligning tools with robust development processes

Flexible equipment model architecture

Design a model that meets both Freeze Version I or Freeze Version II requirements

Drag-and-drop model builder with EDA compliance checker

See graphic representation of the tool under construction and the relationship between different components

Model Wizard and equipment model templates

Reduce the effort to create an E164-compliant equipment model

CIMStore Database Module included

Collect data in database - MySQL, MS SQL, or Oracle - for on-tool storage

CIMWeb EDA-compliant Windows Communication Foundation (WCF) hosted web service

Single point of configuration for web services within the CIMPortal Plus environment

Connect to Freeze Version I and Freeze Version II clients simultaneously

Implements all of the required state machines and automatically handles session persistence, data collection plan persistence, and data collection report buffering

High performance CIMPortal Engine and Data Collection Interface Modules (DCIM)

Exceed SEMATECH's stated performance expectations

High degree of flexibility and configurability

Implement unique deployments that conform to specific fab requirements and protect proprietary data

Advanced message security for unique fab requirements

Secure messaging with authorized Interface A Clients - beyond the scope of the E132 standard  - including support for HTTPS certificate encryption and other security features

Supports ConditionValue traces in Freeze Version II implementations

Enables use of condition-based trace data collection, enabling focused data collection, and reducing the effort to store and analyze data.

TCP/IP Data Collection Interface Module (DCIM)

Collect data from different sources, including non-Windows based systems, while maintaining the value, timing, synchronization, and context of the data

Includes ECCE Plus and simulator

Enables testing of the Interface A connection

Cimetrix "passionate" Support Team - the best in the industry

Fast, thorough responses to your questions and issues

Easy Path to Comply with Freeze II, E164, and MCA Validation

The SEMI E164 standard, approved by SEMI in mid-2012, was developed to encourage companies using EDA/Interface A connections to use a more consistent and high-quality definition of their equipment's model, as represented in the metadata file. Developers can use the MCA, available from SEMATECH, to validate the equipment models they generate.

Just as adding GEM increased the usefulness of the SECS-II Standards, the E164 adds more definition to EDA data collection, making it easier for chip makers to create data collection clients across different equipment types. The combination of Freeze II and the supporting E164 and E157 standards provide compelling benefits for chip makers to use the EDA/Interface A capabilities. Cimetrix believes that the stage is set for wider adoption of Interface A in the industry, which will allow fabs to increase productivity, improve quality, and reduce costs.

CIMPortal Plus software is the easiest and lowest cost solution to achieving Interface A Freeze Version II and E164 compliance in the industry, and it was developed by Cimetrix, the EDA/Interface experts.

For more information about SEMI Standard E164, visit our E164 page.

CIMPortal Plus Development Environment

Equipment Model Development

The heart of a good EDA interface is the equipment model.The model describes the major equipment components in a hierarchal form and lists all of the associated Parameters, Events, Exceptions, and SEMIObjTypes available for data gathering. During development, use the Equipment Modeling GUI to map the data available through Cimetrix Data Collection Interface Modules (DCIM) and custom DCIM with the XML Equipment Model.

The CIMPortal Plus toolkit includes many features that make model building easy. There is a GUI with Visual Studio-style property windows and drop-down menus for model building. Using the new Model Wizard in the CIMPortal Plus Equipment Model Developer, you will generate an equipment model that complies with Freeze Version I, Freeze Version II, and E164 right out of the box. You can then customize the model to match your exact equipment configuration. In addition, the EMDeveloper guides you through the process for proper Metadata Conformance Analyzer (MCA) validation testing. Alternatively, you can develop equipment models programmatically from your application, making calls directly into the model library.

You can also add Access Control Lists to create protected data that only authorized clients can access.

Testing the Interface

The CIMPortal Plus software development kit includes tools for testing, optimizing, and deploying an EDA/Interface A solution. Performance and flexibility have been carefully considered to allow adherence to SEMATECH requirements while considering the technical challenges when integrating multiple distinct data sources.

During development, testing, and optimization, you can use the Cimetrix ECCE Plus SEMI EDA Reference client to validate the Interface A implementation. 

Conditional Value Triggers and SEMI E157

A significant new feature added in Interface A Freeze Version II was conditional value triggers for traces. Conditional value triggers provides the ability to start and stop tracing when a certain given condition is true. This capability, combined with the SEMI E157 Specification for Module Process Tracking standard, offers a powerful way to collect data at precise times during wafer processing that cannot be accomplished with GEM alone. The result is that less data is required, reducing the data gathering effort, and producing data that is far more focused, simplifying the effort to store and analyze it.

CIMPortal Plus enables equipment suppliers to take advantage of the SEMI E157 Module Process Tracking standard. 

While not required by Interface A, CIMPortal Plus also provides the ability to store process data in a local database through the CIMStore database service module, which you can use for local diagnostics and performance optimization.

Non-Windows Applications

In addition, software applications running on non-Windows operating systems like Unix can provide data directly into CIMPortal Plus using the TCP/IP DCIM or TCP/IP App DCIM using a TCP/IP port. While CIMPortal Plus must run on a Windows computer, it is common to use CIMPortal Plus with equipment that has non-Windows computers. Equipment suppliers that use PLCs, Unix, or QNX based control systems add a Windows PC to run CIMPortal Plus to handle the factory communications. Software architects frequently design internal equipment networks with software applications to communicate between systems.

Cimetrix Cooperation with SEMI and SEMATECH

Cimetrix remains committed to maintaining continual involvement in the SEMI standards committees to ensure our products evolve in-step with those standards and fab specific scenarios. Under contract with SEMATECH, Cimetrix originally developed ECCE and ECCE Version 2 to help companies with the adoption of EDA/Interface A. Cimetrix continued to invest in emulator and simulator software, and today we offer ECCE Plus to support both EDA Freeze Version I (1105) and Freeze Version II (0710).

Cimetrix Project Support

When you use a Cimetrix product, our goal is to allow you to control your own destiny. You get our dedicated, passionate support throughout the entire development process. We recommend product training to get your team up to speed quickly. If needed, we also have engineering personnel to work with you on project planning, engineering design, and initial deployment.

Talk to us. We also have strong experience replacing older GW products. Let us know your project requirements to see if CIMPortal Plus is a good solution for you.

Supported SEMI Standards

  • SECS/GEM SEMI Standards: Reference to an equipment interface that complies with SEMI standards,E5 (SECS-II), E30 (GEM), and E37 (HSMS) to provide basic fab MES connectivity. CIMPortal Plus can utilize the features in these standards as one source to generate Interface A Data Collection Reports. These standards also provide the foundation for other connectivity standards such as E39, E40, E87, E90, E94, and E116.
  • E120 Specification for the Common Equipment Model (CEM) and E125 Specification for Equipment Self Description (EqSD): SEMI E120 defines the Common Equipment Model, an abstract model for describing an equipment's physical structure. SEMI E125 is a specific implementation of E120 for equipment self-description that includes units, types, events, state models, equipment structure, and alarms/exceptions. CIMPortal Plus requires a unique data model file for each tool that adheres to these standards. CIMPortal Plus includes an XML schema to enforce the rules for the data model file.
  • E132 Specification for Equipment Client Authentication and Authorization: SEMI E132 defines client authentication and a flexible authorization scheme to control client access. A client cannot access any information through Interface A until authenticated by CIMPortal Plus. Authenticated clients must obtain authority to access data within Interface A. This allows equipment suppliers and fabs to establish rules that restrict access to sensitive or proprietary information.
  • E134 Specification for Data Collection Management: SEMI E134 defines the format and usage of Data Collection Plans and Data Collection Reports for Interface A messaging. CIMPortal Plus accepts standard Data Collection Plans from Interface A Clients and generates the appropriate standard Data Collection Reports using Web Services.
  • E157 Specification for Model Process Tracking: The SEMI E157 Module Process Tracking standard provides a common paradigm for equipment to report data associated with recipe step execution without requiring equipment to change existing recipe definitions. E157 helps both device makers and users of equipment data to collect information from specific process program (Module Recipe Execution) steps. 
  • E164 Specificatin for EDA Common Metadata: The purpose of the E164 specification is to encourage companies developing EDA/Interface A connections to implement a more common representation of equipment metadata. By following the E164 standard, equipment suppliers and fabs can establish greater consistency from tool-to-tool and from fab-to-fab. That consistency will make it easier and faster for equipment suppliers to provide a consistent EDA interface, and for fabs to develop EDA client applications.

Related SEMI SECS/GEM Standards

Additional Resources

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