SECS/GEM
The SECS/GEM standard defines messages, state machines and scenarios to enable factory software to control and monitor manufacturing equipment. Many different types of equipment in semiconductor (front end and back end), surface mount technology, electronics assembly, photovoltaic, flat panel display and other industries worldwide provide a SECS /GEM interface on the manufacturing equipment so that the factory host software can communicate with the machine for monitoring and/or controlling purposes. Because the GEM standard was written with very few semiconductor-specific features, it can be applied to virtually any manufacturing equipment in any industry.
View the complete list of Software Products for SECS/GEM Implementation.
GEM300
With the transition to 300mm wafers, the level of factory automation in the fabs increased significantly. SEMI introduced the GEM 300 standards to allow this dramatic change to be implemented as cost effectively as possible. Compliance with the SEMI 300mm communication standard is no longer optional. 300mm semiconductor factories require equipment suppliers to fulfill the standards in order to implement factory automation.
View the GEM300 Family of Software Products.
EDA/Interface A
Industry experts developed the Interface A standards in order to facilitate data acquisition integration and improve data quality. Fabs will use Interface A for APC data gathering and e-diagnostics while the existing SECS/GEM interface will remain intact for MES connectivity. When implemented, these standards provide a convenient interface for Equipment Data Acquisition using SOAP/XML messages over an HTTP or HTTPS connection.
View Cimetrix's Products & Tools for Implementing the Interface A Standards.
SEMI Standards Tools & References
Cimetrix has partnered with the International SEMATECH Manufacturing Initiative (ISMI) to provide reference artifacts to guide the industry, ensuring accuracy and interoperability of SEMI standards implementation: RaP Reference Implementation (RRI) and Equipment Client Connection Emulator (ECCE).
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Standard
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Description
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Selected by ISMI as the official Equipment Data Acquisition (EDA) reference client for validating a web server that implements the SEMI Interface A (EDA) standards.
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An ISMI sponsored project for a "reference implementation" of the SEMI E139 Recipe and Parameter (RaP) Management standard.
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- Software Products for Implementing the SECS/GEM Standards
- GEM 300 Software Solution for 300mm Wafer Manufacturing
- Interface A Software Products & Tools
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